Facilities & Equipment

Nano-Fabrication

nano-fabrication
南科大校级微纳加工平台
Most of the nanofabrication in our research can be performed in the SUSTech University Cleanroom. Key capabilities include electron-beam lithography, photolithography, PECVD, LPCVD, ALD, ICP, RIE, and so on. For more details, please visit the official website.

Optoelectronic Characterization

Photonic chip testing system
For characterizing integrated photonic devices and optoelectronic chips for various applications, including optical signal processing, photonic computing, entangled photon-pair generation, and integrated lidars. Key facilities include:
• Wavelength tunable infrared lasers
• High-speed modulators and detectors
• Optical spectra analyzers
• RF sources, spectra analyzers, and network analyzers
• Superconductor-based single-photon counters
• Liquid Helium cryogenic probe station
Meta-surface and quantum matter characterization
For characterizing photonic nano-structures, quantum materials, and hybrid light–matter quantum states. The system grants full control over nearly all degrees of freedom of photons, with ultrafast time resolution of 100 fs. Key facilities include:
• Custom angle-resolved microscope
• Transient pump-probe system
• High-resolution spectrometer & single-photon detection setup
• Piezo scanning stages, lock-in amplifier, cryostat
III-V semiconductor laser characterization
For characterizing optical/electrical pumped semiconductor lasers at communication bands. Key facilities include:
• Pump lasers (high power ns laser)
• High-power electrical source
• Infrared spectrometer (Andor Kymera + iDus CCD)
• Infrared CMOS camera (Hamamusu)
• Superconductor-based g2 measurement system
Nano-mechanics and on-chip phonon characterization
Under construction...