Nano-Fabrication

nano-fabrication
SUSTech Core Research Facilities (CRF)
Most of our devices—photonic crystals, microcavities, integrated photonic chips, and NEMS—can be fabricated in the SUSTech Core Research Facilities (CRF), which provides a complete nanofabrication chain: pattern definition (electron-beam and photolithography), thin-film deposition (PECVD, LPCVD, ALD), and etching (ICP-RIE). For more details, please visit the official website.

Optoelectronic Characterization

Meta-surface and quantum matter characterization
For characterizing photonic nano-structures, quantum materials, and hybrid light-matter quantum states across nearly all photonic degrees of freedom, with ultrafast time resolution of 100 fs.
Key facilities include:
• Custom angle-resolved microscope
• Transient pump-probe system (under construction)
• High-resolution spectrometer & single-photon detection setup
• Piezo scanning stages, lock-in amplifier, cryostat
III-V semiconductor laser characterization
For characterizing optical/electrical pumped semiconductor lasers at communication bands. Key facilities include:
• Pump lasers (high power ns laser)
• High-power electrical source
• Infrared spectrometer (Andor Kymera + iDus CCD)
• Infrared CMOS camera (Hamamatsu)
• g2 measurement system (under construction)
Nano-mechanics and on-chip phonon characterization
This characterization platform is currently being established. More details will be updated soon.
Photonic chip testing system
This characterization platform is currently being established. More details will be updated soon.